>> P.284
CommentaryLaserOperatingMethodandPrecautionsEachVMUandFS70seriesofMitutoyomicroscopeunitsusesabuilt-inlaser[mainly,Nd-YAGlaserfundamentalwave(1064nm),secondharmonic(532nm),thirdharmonic(355nm)andfourthharmonic(266nm)]toallowlasermachining.Inlasermachiningwithalaser-equippedmicroscopeunitandamicroscopeobjective,high-powerlaserirradiationisnotallowedforthepurposeofmicrofabrication.IMPORTANT:Reviewlasersafetyprecautionspriortouse.LaserInputConditionsofLaser-EquippedMicroscopeUnitDeterminetheupperlimitvalueoflaserinputunderthefollowingconditions.Laserradiationincidentontheopticalsystemshallbeaxialandnon-polarized.VMUSeriesApplicableModelWavelengthused(nm)PulselaserUpperinputlimit(J/cm2)Pulsewidth(10ns)UpperlimittoCWlaserinput(kW/cm2)FS70SeriesApplicableModelWavelengthused(nm)PulselaserUpperinputlimit(J/cm2)Pulsewidth(10ns)UpperlimittoCWlaserinput(kW/cm2)10640.0990.2210640.0900.23VMU-LB5320.0750.183550.0250.07FS70L5320.0750.1810640.110.23550.0180.06VMU-L4B5320.0800.193550.0350.05FS70L45320.0750.22660.0150.052660.0150.05UpperLimittoObjectiveLaserInputDeterminetheupperlimitvalueoflaserinputunderthefollowingconditionsifthelaserradiationdirectlyenterstheobjective.Laserradiationincidentontheopticalsystemshallbeaxial.VMUSeriesApplicableObjectiveNIRseriesWavelengthused(nm)PulselaserUpperinputlimit(J/cm2)Pulsewidth(10ns)UpperlimittoCWlaserinput(kW/cm2)10640.20.5NIRseriesNUVseriesUVseries5320.10.25NUVseriesUVseries3550.050.162660.040.12Note:Ifthepulsewidthofthelaserisshortened,reducetheirradiationenergydensitybythesquarerootoftheratioofthenewpulsewidthtotheinitialpulsewidth.Example:Ifthepulsewidthdecreasesto1/4oftheinitialwidth,reducetheenergydensitytoapproximately1/2.Thereforewhenusingalaserwithawavelengthof1064nmandapulsewidthof2.5ns,theupperlimitingvalueofinputwillbe0.1J/cm2.7-27
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